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The synthesis and studies of multilayer conductive thin-film coatings of Oxide, Oxide/Metal, Metal/Oxide and Oxide/Metal/Oxide types have been carried out. The conditions for using the developed structures as electrodes for transparent electronic devices have been determined. Optimization of layer thicknesses has a positive effect on the general physical properties of transparent electrodes. The advantage of using Oxide/Metal/Oxide type structure on flexible substrates and the improvement of optical and electrical properties in comparison with the oxide type structure are shown. As a result, the quality index of transparent FoM electrodes was increased by 40% compared to monolayer ITO. As a result of this study, an electrode with a surface resistance of 12.1 Ohm/sq and an average transmittance of 76% in the optical range was synthesized.

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Optimization of Electro-Optical Parameters of Transparent Thin-Film Electrodes as a Method to Increase the Energy Efficiency of Transparent Electrical Devices

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  • 发表日期：

    2025年

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  • Nikita Parashchuk,
  • Sergey Stakharny,
  • Aleksandr Zaharov,
  • Aleksandr Trubin,
  • Olga Chemeris

摘要

The synthesis and studies of multilayer conductive thin-film coatings of Oxide, Oxide/Metal, Metal/Oxide and Oxide/Metal/Oxide types have been carried out. The conditions for using the developed structures as electrodes for transparent electronic devices have been determined. Optimization of layer thicknesses has a positive effect on the general physical properties of transparent electrodes. The advantage of using Oxide/Metal/Oxide type structure on flexible substrates and the improvement of optical and electrical properties in comparison with the oxide type structure are shown. As a result, the quality index of transparent FoM electrodes was increased by 40% compared to monolayer ITO. As a result of this study, an electrode with a surface resistance of 12.1 Ohm/sq and an average transmittance of 76% in the optical range was synthesized.