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The chapter explores the evolution and integration of Microelectromechanical Systems (MEMS) sensors with artificial intelligence (AI), spanning diverse applications. MEMS technology has revolutionized sensor development, enabling high-performance systems in transportation, healthcare, defense, and consumer products. Sensors detect environmental stimuli and convert them into measurable digital signals, facilitating diverse applications from force and pressure sensing to image and acoustic recognition. Recent trends highlight AI integration with MEMS sensors, enhancing capabilities in edge computing, IoT, and smart devices. Advancements include object recognition in image sensors, speech recognition with MEMS microphones, and gesture-controlled devices. Challenges persist in seamlessly integrating AI sensors for comprehensive environmental monitoring and healthcare applications. The chapter aims to elucidate the fundamentals of MEMS sensors, explore AI integration, and discuss potential benefits and challenges. Through case studies and examples, it provides insights into successful implementations and outlines future directions for advancing sensor technologies through the collaborative synergy of MEMS and AI.

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Synergizing MEMS Technology and Artificial Intelligence for Enhanced Sensor Applications

  • 章节

  • 发表日期：

    2025年

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  • M. Suresh,
  • Sadanand Singh,
  • Rishita Singh,
  • Anirudh Santhosh,
  • Nibedita Rakshit

摘要

The chapter explores the evolution and integration of Microelectromechanical Systems (MEMS) sensors with artificial intelligence (AI), spanning diverse applications. MEMS technology has revolutionized sensor development, enabling high-performance systems in transportation, healthcare, defense, and consumer products. Sensors detect environmental stimuli and convert them into measurable digital signals, facilitating diverse applications from force and pressure sensing to image and acoustic recognition. Recent trends highlight AI integration with MEMS sensors, enhancing capabilities in edge computing, IoT, and smart devices. Advancements include object recognition in image sensors, speech recognition with MEMS microphones, and gesture-controlled devices. Challenges persist in seamlessly integrating AI sensors for comprehensive environmental monitoring and healthcare applications. The chapter aims to elucidate the fundamentals of MEMS sensors, explore AI integration, and discuss potential benefits and challenges. Through case studies and examples, it provides insights into successful implementations and outlines future directions for advancing sensor technologies through the collaborative synergy of MEMS and AI.