Scholarlink

This paper describes MEMS/MOEMS/NEMS based on polymer fibers of polyvinylidene fluoride (PVDF) and other ferroelectric polymers that exhibit piezoelectric effect, that can be spatially directed/oriented and programmably change their shape under the electron beam, respond to the external fields and laser exposure. Original results of our latest experiments in this field are presented, proving that such fibrillar microstructures are capable of performing various mechanical functions and simultaneously acting as the light guides or waveguides, as well as performing the functions of the spatial light modulators or diffraction gratings with an adjustable slit, combining the functions of MEMS and MOEMS. Robustness and reliability of such systems to the mechanical fracture in vacuum are considered with reference to the time-resolved SEM registration of the polymer fibers. The problem of mechanical failures and fuzzy addressing due to the inherent mechanical/elastic characteristics of the fibers is discussed. The possibilities of the smart fiber MEMS/MOEMS and NEMS application in environmental conditions (from ecology and Earth sciences to aerochemical measurements or aerosol sciences) and vacuum space conditions are considered.

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Towards Ferroelectric Smart Polymer Fiber-Based MEMS/MOEMS/NEMS with Laser-Assisted Control and Electron-Beam Addressing of the Fiber Actuators

  • 章节

  • 发表日期：

    2025年

查看全文
  • Oleg V. Gradov,
  • Margarita A. Gradova,
  • Irina A. Maklakova,
  • Anna V. Ratnovskaya,
  • Eugenia L. Buryanskaya,
  • Anatoly A. Olkhov,
  • Alexei L. Iordanskii,
  • Valentin V. Kochervinskii

摘要

This paper describes MEMS/MOEMS/NEMS based on polymer fibers of polyvinylidene fluoride (PVDF) and other ferroelectric polymers that exhibit piezoelectric effect, that can be spatially directed/oriented and programmably change their shape under the electron beam, respond to the external fields and laser exposure. Original results of our latest experiments in this field are presented, proving that such fibrillar microstructures are capable of performing various mechanical functions and simultaneously acting as the light guides or waveguides, as well as performing the functions of the spatial light modulators or diffraction gratings with an adjustable slit, combining the functions of MEMS and MOEMS. Robustness and reliability of such systems to the mechanical fracture in vacuum are considered with reference to the time-resolved SEM registration of the polymer fibers. The problem of mechanical failures and fuzzy addressing due to the inherent mechanical/elastic characteristics of the fibers is discussed. The possibilities of the smart fiber MEMS/MOEMS and NEMS application in environmental conditions (from ecology and Earth sciences to aerochemical measurements or aerosol sciences) and vacuum space conditions are considered.