The development of a MEMS (Micro-Electro-Mechanical Systems) resonator for high frequency use is the aim of this research. For effective power transfer with little loss, the RF MEMS device should have critical characteristics including a high Q, high fr, and low Rm. With the development of quick wireless technology, the requirements for these performance metrics are rising. For a radio frequency electromechanical resonator to directly interface with small, low-power 50–75 electronics, it is essential to produce a low amount of motional resistance. The piezoelectric MEMS resonator may effectively meet each of these requirements. The laterally vibrating contour mode MEMS resonator design, operating at the GSM range frequency is given in this study. COMSOL Multiphysics simulations were used to finalize and optimize the device's geometry, dimensions, and materials. Zinc oxide (ZnO), a green, environmentally friendly piezoelectric material, has been employed for its low deposition temperature, strong bonding, unique semiconductor properties, and optical characteristics. ZnO exhibits exceptional tensile strength, allowing it to endure substantial mechanical deformation over prolonged periods without being affected by temperature variations.