Digital Twins for Sustainable Semiconductor Manufacturing

This chapter explores the applications of Digital Twins in smart semiconductor manufacturing, highlighting their potential to drive a more sustainable industry. Digital Twins enable advanced monitoring of chemical and energy consumption, as well as other environmental impacts within semiconductor fabrication processes. The chapter reviews various initiatives and applications that utilize Digital Twins for smart monitoring and provides guidance on extending these efforts to further optimize semiconductor manufacturing. This includes enhancing device performance, yield, and cost of ownership, while minimizing environmental impact. The chapter concludes that achieving truly smart manufacturing requires a holistic approach focused on optimizing specific equipment design and processes (such as deposition, etch, lithography, chemical mechanical planarization) and fostering cohesive collaboration among stakeholders from academia and industry. Addressing the gaps in understanding physics, chemistry, sensor technology, software infrastructure, data security, and establishing universal standards and protocols for data sharing and integration are essential for realizing the full potential of Digital Twins in the semiconductor industry.