X-ray Diagnostics of Nanoscale Defects in Single Crystals by Deformation Dependencies Method for Total Integrated Intensity of Dynamical Diffraction

会议论文
发表日期：

2024年

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V. B. Molodkin,
G. I. Nizkova,
T. P. Vladimirova,
Y. V. Vasylyk,
A. O. Bilotska,
I. I. Demchik,
L. I. Makarenko,
S. V. Lizunova,
V. V. Molodkin,
I. M. Zabolotnyy,
V. V. Lizunov

摘要

The interconnection between parameters of deformation dependencies of total integrated intensity of dynamical diffraction and parameters of imperfect structure of single-crystalline materials with different defect structures is determined in both “thin” crystal and “thick” crystal approximations with using high-order reflexes and significant values of effective deformations. It is shown that deformation dependencies of diffuse component of total integrated intensity of dynamical diffraction are qualitatively different from each other for various types of microdefects. As a result, the deformation dependencies of total integrated intensity of dynamical diffraction are selectively sensitive to type defects for single crystal with a several types of defects at different effective deformation. The possibility of multiparametrical diagnostics of parameters of microdefects in single crystals Si based on using different intervals of deformation dependency is demonstrated.