Exploring Plasma Discharge Characteristics in Two-Dimensional Inductively Coupled Reactors: Insights from Maxwellian, Druyvesteyn, and Two-Term Boltzmann Electron Energy Distribution Functions

In this study, a radiofrequency discharge of argon was modeled in a 2D inductively coupled plasma reactor, utilizing both Maxwellian and bi-Maxwellian electron energy distribution functions of Druyvesteyn. The aim was to assess the real advantage and significant contribution of employing the bi-Maxwellian distribution function of Druyvesteyn compared to the Maxwellian function in determining the fundamental characteristics of a radiofrequency plasma discharge. The results show the evolution of electron energy distribution functions, specifically Two-Term Boltzmann, Druyvesteyn, and Maxwellian, to characterize the RF discharge of argon plasma under low pressure and temperature conditions. By comparing the outcomes obtained with the Two-Term Boltzmann and Druyvesteyn electron energy distribution functions to those calculated with the Maxwellian function, it is concluded that the utilization of the Two-Term Boltzmann and Druyvesteyn EEDFs aligns closer to reality and proves more effective in describing the evolution of a radiofrequency plasma discharge in an inductively coupled reactor.