Variation-Aware Design of Reliable Piezoelectric MEMS Energy Harvesters

In this chapter, we propose a process variation-aware MEMS device design flow where a fast device model is available. We start with explaining the process-aware MEMS design flow used during this work. We present our motivation for considering process variability in the design flow and proceed to present two variants of process variation- aware MEMS design flow, one with the stochastic simulation as part of the optimization loop and one where it is decoupled from the optimization loop.