Symbolic Model Order Reduction Using Perturbation Analysis

In this chapter, a novel symbolic modeling methodology is presented for MEMS devices having beams with tapered geometries. Such beams are very common in piezoelectric energy harvesters. While a closed-form solution for the device model may be possible in cases without taper, it becomes increasingly difficult to obtain for tapered devices. Symbolic perturbation analysis is employed where the tapering slope is used as a symbolic perturbation parameter around the nominal case of no taper.