Development of High Efficiency and High Precision X-ray Reflective Optics for Advanced Light Sources at IPOE

X-ray multilayers are key optical elements in synchrotron radiation and free electron laser facilities, they can realize highly efficient reflection, monochromatization and polarization of X-rays. At Institute of Precision Optical Engineering (IPOE), the systematic studies on high efficiency and high precision X-ray optics have been conducted for a long time. In this paper, we will introduce the results and progress that were achieved by our group in X-ray multilayer elements. We have developed the large hard X-ray multilayer mirrors, which have been successfully applied in synchrotron radiation facilities both in China and abroad. Through the combination of multilayer and reflective gratings, the tender X-ray multilayer grating optics fabricated in our lab got a maximum efficiency improvement of 40 times compared with conventional single-layer gratings. The high precision mirror substrates for X-ray optics were manufactured by robotic polishing and ion beam figuring, whose largest size could reach the 0.5 m in length.