Performance Enhancement of a Film Bulk Acoustic Resonator Using Taguchi DoE and ANOVA Techniques

The current study emphasizes the use of Taguchi DoE and ANOVA to predict the optimal FBAR parameters and to assess the impact of various layers thicknesses on sensor performance. Taguchi DoE has been employed to estimate optimum design parameters of the FBAR sensor, and to verify the results, finite element modeling (FEM) simulations have been conducted on COMSOL Multiphysics software. The optimization has been carried out for the enhancement in the coupling coefficient of the FBAR sensor. The optimum thicknesses for piezoelectric, insulating layer, and metal electrodes are calculated to be 0.2 µm, 2 µm, and 0.3 µm, respectively. Based on the current study, the simulated values of the coupling coefficient ( \( K_{eff}^{2}\) ) for the optimum dimension of the FBAR structure are 0.075056, or 7.506%.