Until the mid-1980s, the nMOS silicon-gate process was the most commonly used process for MOS LSI and VLSI circuits. However, nearly all modern VLSI and memory circuits are made in CMOS processes. CMOS circuits are explained in Chap. 4; the technology used for their manufacture is discussed in this chapter.

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Manufacture of MOS Devices

  • Harry Veendrick

摘要

Until the mid-1980s, the nMOS silicon-gate process was the most commonly used process for MOS LSI and VLSI circuits. However, nearly all modern VLSI and memory circuits are made in CMOS processes. CMOS circuits are explained in Chap. 4; the technology used for their manufacture is discussed in this chapter.