Manufacturing Processes

Authored by leading experts in semiconductor technology, this chapter of this book delves into the forefront of innovation: the fabrication of silicon carbide (SiC) devices. John R. Silk from SemiQ, Inc., introduces bulk growth and epitaxial growth techniques essential for superior SiC semiconductor device performance. Dr. Victor Veliadis of PowerAmerica and NC State explores ion implantation in SiC devices, emphasizing optimization for power electronics. Dario Tenaglia and Paolo Badalà of STMicroelectronics detail crucial etching and metallization processes, advancing device reliability and performance. Simone Rascunà, from STMicroelectronics, concludes with a comprehensive overview of SiC fabrication, illuminating the complexities from ion implantation to metallization. This chapter offers a rich exploration of SiC manufacturing processes, vital for understanding cutting-edge semiconductor technologies.