Silicon Photonic Wafer-Scale Yield of Single Mode Resonator with Broadband DBR Mirrors

会议论文
发表日期：

2024年

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Arnab Goswami,
Pratyasha Priyadarshini,
Gan Yih Loong,
Ng Chew Yan,
Deleep Nair,
Anjan Chakravorty,
Bijoy Krishna Das

摘要

We demonstrated compact DBR cavities with broadband DBR mirrors using SilTerra’s 200 mm silicon photonics foundry process line. The wafer-scale yield has been analyzed in terms of resonance wavelength and quality factor. The standard deviation of the resonant wavelength and quality factor are found to be 3.735 nm and 2650 respectively.