Low-Loss, Buried InGaAs/InP Integrated Waveguides Operating in a Wide Mid-Infrared Range
摘要
This work introduces a photonic integrated platform based on buried InGaAs waveguides with InP cladding designed to operate in a wide mid-infrared (mid-IR) spectral range. Through the utilization of wet-etch fabrication patterning combined with Fe doping, the platform achieves remarkably low propagation losses. Experimental characterization reports losses below 1.2 dB/cm (equivalent to a 0.3 cm−1 loss coefficient) within the wavelength range of 4.6 to 11.2 µm (or 890 to 1960 cm−1 wavenumber), and for both TE and TM polarization modes.