Si3N4 Microring-Resonator-Based Integrated Photonic Sensor for Enhanced Label-Free Biofluid Analysis in the 850 nm Optical Band
摘要
We present an innovative integrated photonic sensor for point-of-care applications using silicon nitride (Si3N4) tailored for biofluids analysis in the 850 nm optical band. With microring resonators (MRR) we detect smallest changes in the effective refractive index of the waveguide, achieving a sensitivity of 46 nm/RIU (refractive index unit) and a system limit of detection (LOD) of 5.8 · 10–5 RIU. Furthermore, the successful integration of photodiodes directly into the Si3N4 photonic integrated circuit (PIC) output was demonstrated. Our preliminary work offers promising prospects for future use in lab-independent environments where compact, low-cost and fast sensors are needed that also support multi-channel applications.