Waveguide Undercut in High-Confinement Silicon Nitride Platform for Enhanced Phase-Shifters Performance

会议论文
发表日期：

2024年

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Anton Stroganov,
Henry Francis,
Camiel Op de Beeck,
Davide Sacchetto,
Ozren Petrovic,
Antoine Brimont,
Michael Geiselmann

摘要

We demonstrate a reproducible, wafer-scale waveguide undercut process in an industrial silicon nitride platform for enhanced phase-shifters efficiency. In particular, this approach allows up to tenfold reduction in power consumption with respect to standard thermo-optical tuners.