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Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning

  • 会议论文

  • 发表日期：

    2024年

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  • P. Venkatachalam,
  • Daniel Yumnam,
  • Sushma Gali,
  • Mruthyunjaya K. Swamy,
  • Shankar Kumar Selvaraja

摘要

We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever.