Monolithically Integrated Visible-Light MEMS Switch

会议论文
发表日期：

2024年

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Alperen Govdeli,
Hong Chen,
Saeed S. Azadeh,
John N. Straguzzi,
Hongyao Chua,
Guo-Qiang Lo,
Joyce K. S. Poon,
Wesley D. Sacher

摘要

We demonstrate a monolithically integrated, electrostatic MEMS-actuated optical switch for visible light with >7 dB extinction ratio and 2.5 dB loss at a wavelength of 540 nm. We measured rise and fall times of 5 µs and 28 µs, respectively, and a low static power dissipation of <1 nW.