Photonic Platform for Industrially Microfabricated Ion Traps
摘要
On chip light delivery has proven to be key for scaling up the number of qubits in a trapped ion quantum processor and enable large scale quantum computing. This can be achieved with structured thin films dielectrics, but its fabrication comes with challenges including a broad wavelength range and thermal budget constraints. At Infineon, we are studying photonic structures suitable for the visible spectrum, their fabrication processes and material properties. We present results for low surface roughness silicon nitride films and loss measurements on waveguides as a first step to integrate photonic layers in our microfabricated ion traps.