Visible-Light Optical Phased Arrays with a Convex Grating Emitter on Implantable Neural Probes for Spatially Targeted Deep Brain Optogenetics
摘要
We demonstrate single-lobe beam-steering at λ = 460–478 nm using an end-fire optical phased array coupled to a free-propagation region slab and convex grating for out-of-plane emission. Our design achieves sidelobe-free steering over 57% of the total maximum steering range 100 µm away from the OPA. The devices were implemented in silicon nitride waveguides and integrated on implantable silicon neural probes for targeted optogenetics.