Foundry Fabricated Thin-Film Lithium Niobate Electro-Optic Modulators for Blue Light
摘要
We demonstrate a thin-film lithium niobate electro-optic modulator operating at a blue wavelength of λ = 445 nm. The modulator was fabricated in a generic lithium niobate photonic foundry process on a 150-mm diameter thin-film lithium niobate wafer. The Mach-Zender modulator has 1.9-mm long phase shifters and exhibits a low half-wave voltage of 1.80 V, a high extinction ratio >15 dB, and an estimated device insertion loss of 3 dB.