Standardized TFLN Photonic Integrated Circuits Platform
摘要
We present a thin-film lithium niobate (TFLN) on insulator photonic integrated circuits (PICs) platform based on a 150 mm wafer-scale manufacturing technology. The platform comprises a library of standardized building blocks, so-called process design kit (PDK). Low loss waveguides and fast electro optical modules are reliably manufactured in a well-defined foundry process addressing the demands of various fields from telecom to quantum applications.