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Tribological Aspects of in Situ Manipulation of Nanostructures Inside Scanning Electron Microscope

  • Boris Polyakov,
  • Leonid Dorogin,
  • Sven Oras,
  • Rynno Lõhmus,
  • Sergei Vlassov

摘要

This chapter is dedicated to manipulation of nanostructures inside a scanning electron microscope (SEM) employed for real-time tribological measurements. Different approaches to force registration and calculation of static and kinetic friction are described. Application of the considered methodologies to manipulation of nanostructures with different materials and geometries are demonstrated. Visually guided assembly of nanoscale devices is demonstrated. Advantages and limitations of the technique in comparison to traditional AFM-based manipulation techniques are discussed.