Calculation and Analysis of Electron Transport Coefficient in TEOS-CO2 Mixtures Using Two-Term Boltzmann Approximation
摘要
The electron transport coefficients in TEOS-CO2 mixture were firstly calculated using two-term Boltzmann approximation method for E/N (ratio of the electric field E to the neutral number density N) range of 0.1–1000 Td (Townsend). These calculations based on the reliable electron collision cross section set for TEOS and CO2 molecules. Therefore, the present results will be the necessary data for applications using TEOS-CO2 mixture, especially in plasma polymerization.