A Comparative Study of Two Types of Bifurcation-Based MEMS Sensors

会议论文
发表日期：

2024年

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Yasser S. Shama,
Rana Abdelrahman,
Mohamed Arabi,
Resul Saritas,
Sasan Rahmanian,
Ahmet Gulsaran,
Samed Kocer,
Alaa Elhady,
Hamza Mouharrar,
Eihab M. Abdel-Rahman

摘要

This paper compares two types of inertial electrostatic MEMS methane sensors, one based on a cyclic-fold bifurcation and another based on a primary Hopf bifurcation. We find the Hopf-based sensor is 40% more sensitive than the cyclic-fold sensor and that the detection signal, and therefore the signal-to-noise ratio, of the former is 25% larger than that of the latter.