Single-Crystal Diamond MEMS Magnetic Sensor

Single-crystal diamondSingle-crystal diamond (SCDSCD) is a promising material for high-performance and high-reliabilityReliability micro-electromechanical systemMicro-electromechanical system (MEMS) superior to other semiconductor materials (Si, III-nitrides, SiC, etc.,) in terms of the outstanding properties such as ultra-wide bandgap energy, mechanical strengthMechanical strength, thermal conductivityThermal conductivity, and chemical inertnessChemical inertness. In this chapter, we review our recent progress in diamond MEMSMEMS magnetic sensorsMagnetic sensors by integrating a magneto-strictive galfenolGalfenol (FeGaFeGa) thin film on SCD MEMS resonators for high-temperature conditions. The magnetic sensing mechanism of magnetic sensors is discussed. The thermal stability of the sensors is analyzed and the strategies to enhance the magnetic sensing performance of the magnetic sensors are described.