Surface Inductance of Superconductive Striplines

Inductance in superconductive circuits plays a significant role in rapid single flux quantum (RSFQ) systems. Inductance estimation is a challenging issue. The microwave behavior of these inductances is characterized by the surface inductance of a line. A methodology to accurately estimate the surface inductance of a stripline is the focus of this chapter. A closed-form expression describing the dependence of the surface inductance of a stripline on the line thickness, magnetic field, and current density is provided. The effects of process parameter variations on the surface inductance are also discussed. An expression to model the effects of the trapezoidal geometry of a stripline is presented. The dependence of the surface inductance on the oxide and metal layer thickness is also presented. The objective is to provide an accurate estimate of the surface inductance for use in automated routing of VLSI complexity RSFQ circuits.