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AFM Imaging Control and System Integration

  • Fangzhou Xia,
  • Ivo W. Rangelow,
  • Kamal Youcef-Toumi

摘要

The development of an atomic force microscopy (AFM) system requires a comprehensive understanding of mechatronics and instrumentation. This chapter focuses on integrating the AFM system with additional modules and control strategies for AFM imaging, building upon the subsystems introduced in previous chapters. The control algorithms necessary for AFM imaging are discussed, covering both low-level control for scanner axis motion and high-level control for overall AFM imaging. Furthermore, the chapter discusses additional modules for AFM system integration, including the optical microscope, the imaging environment control chamber, and the image post-processing software. The chapter also provides a brief overview of specialized imaging modes beyond topography imaging. Finally, an example of a modular AFM system design capable of working with both passive and active probes is presented.