AFM Probe Functionalization and Active Element Fabrication

This chapter expands on the previously discussed nanofabrication processes to cover the integration of functional components into AFM cantilever probes. Advanced nanofabrication techniques empower AFM probes with a variety of new capabilities to meet experimental needs. First, the modification of AFM probes on both the tip and the microcantilever are discussed for specialized imaging applications. Next, nanofabrication techniques to embed functional elements into AFM cantilever probes for sensing and actuation are discussed. The cantilever probe nanofabrication process can vary in the sequences and tools needed depending on their availability, and step-by-step instructions for several probe designs are provided as examples. In the end, a number of sensing applications using functionalized tipless microcantilevers are discussed.