Nanofabrication of AFM Cantilever Probes

This chapter delves into the nuances of nanofabrication, with a particular focus on the manufacturing of passive AFM microcantilevers. An examination of the primary nanofabrication techniques, along with the corresponding enabling technologies, will be the starting point. The process principles, such as deposition, etching, patterning, and surface modification, are discussed, especially in the context of microcantilever nanofabrication. In addition, the chapter illuminates the characterization tools typically available in nanofabrication facilities and utilized for assessing MEMS device properties. Finally, some specific details of fabricating a traditional passive AFM probe are presented including the necessary procedures for both direct and indirect methods.