Nanoscale Actuation and Active AFM Probe Design Examples

This chapter focuses on suitable actuation methodologies for driving AFM cantilevers, along with design examples of active AFM probes with integrated sensing and actuation elements. Similar to sensing, actuation of the cantilever probe can be achieved through both external and internal means. The primary requirement for dynamic mode operation is excitation of the cantilever resonance. Some actuation strategies can also allow control over static deflection. To conclude, the chapter showcases examples of AFM cantilever probes built using combinations of embedded self-sensing and self-actuated methods.