Numerical Simulation and Experimental Research of Multi-stage Roots Vacuum Pump

Multi-stage roots pump is generally used as vacuum pump, which have medium tolerance and high gas flow. Multi-stage roots vacuum pump (MSRVP) is often used in the semiconductor and photovoltaic industries. The rotor of the MSRVP is a straight-blade rotor, so the theoretical internal pressure ratio of MSRVP is 0, and the pressure distribution in the cavity is established by leakage. One-dimensional working process simulation is difficult to predict its performance and internal flow. It is necessary to intuitively understand the mechanism of internal flow heat transfer in multi-stage roots through experiments and three-dimensional simulation. The MSRVP studied in this paper is six-stage rotor with two-lobes. A three-dimensional internal flow field model of a MSRVP is established, and a performance test bench is built to measure its performance. The experimental results are in good agreement with the three-dimensional simulation results. The simulation results reflect the fluid flow inside the MSRVP, and the pressure established by the internal leakage can be obtained more clearly.