Manufacturing of Areal Material Measures
摘要
Whereas the profile-based measurement and the calibration of the corresponding measuring instruments has been applied for a long time, the discipline of areal surface topography measuring instrument calibration still faces challenges. In the CRC 926, the design of corresponding material measures which can map the metrological characteristics to be considered in areal surface topography measurement just as well as the manufacturing of areal material measures using micro-milling and direct laser writing were examined. The results of different parameter studies for the design and manufacturing are presented in the following.