Resonant Silicon Microcantilevers for Particle and Gas Sensing

Resonant Silicon Microcantilevers (RSMCs) serve as highly suitable Mass-Sensitive Transducers (MSTs) for effective miniaturization, owing to their uncomplicated cantilever device structure and the inherent architectural adaptability of silicon. In comparison with conventional technologies, resonant microcantilevers offer several promising advantages: exceptional sensitivity, cost-effectiveness, robustness, scalability, minimal sample requirements, low energy consumption, rapid response times, and a label-free process devoid of hazards. The extensive research conducted on microcantilever sensors has underscored their versatile analytical capabilities, encompassing the detection of particulate matter in both air and liquids, humidity measurement, and gas sensing applications. This comprehensive chapter presents a thorough exploration of the cutting-edge advancements in microcantilever-based particle and gas sensors. It delves into their underlying working principles, design considerations, the functionalization and packaging of microcantilevers, and the manifold applications they serve, while also shedding light on the future potential in this domain.