Abstract
Arrays of vertically oriented carbon nanotubes (VOCNTs) with a height from 25 to 100 \(\mu\) m and a specific resistance from 1.5 to 4 \(\Omega\) cm have been grown by catalytic chemical vapor deposition on the Si/HfO \({}_{2}\) /Fe surface for the first time. The growth of VOCNTs on hafnium oxide is observed within a temperature range of \(625{-}725\) °C and does not occur at \(T\geq 750\) °C. At the same time, the temperature dependence of the VOCNT growth rate is characterized by a value of \(\sim\) 1.5 eV. Using high-resolution scanning electron microscopy and Raman spectroscopy, the predominance of nanotubes with diameters from 1 to 10 nm in the array is shown. It has been revealed that HfO \({}_{2}\) nanocrystallization during the annealing of substrates complicates the SEM analysis of catalytic Fe particles, whose size on the surface of initial amorphous HfO \({}_{2}\) is \(2{-}5\) nm.
