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AFM Visualization of Conductivity and Morphology of BC\({}_{\boldsymbol{x}}\)-Film Surface Obtained by SLD Method

  • P. V. Zinin,
  • A. A. Bykov,
  • R. I. Romanov,
  • A. A. Korneeva,
  • A. V. Andreev,
  • A. Yu. Belykh,
  • S. Yu. Krasnoborod’ko,
  • V. A. Kukushkin

摘要

Abstract

Materials with nonstandard physical properties are widely used in various fields of science and technology, from microelectronics to heavy industrial installations. At one time, international scientific teams carried out mathematical calculations showing that the most promising compounds of B–C structures which, under certain external conditions and concentration ratios, have strong chemical sp \({}^{2}\) and sp \({}^{3}\) bonds. Such materials are characterized by high hardness, resistance to aggressive media, and conductivity. This work is aimed at the synthesis and study of carbon-containing BC \({}_{x}\) films. This paper presents the results of measuring a thin BC \({}_{5}\) film. The spectral characteristics of the film, data on its layer thickness, conductivity, and composition were obtained by using X-ray, Raman, and photoelectron spectroscopy.