Homogeneous Array of Nanopits on the Surface of InAlAs Layers Grown by Molecular Beam Epitaxy on an InP (001) Substrate

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发表日期：

2024年4月1日

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D. V. Gulyaev,
D. V. Dmitriev,
A. I. Toropov,
S. A. Ponomarev,
K. S. Zhuravlev

摘要

Abstract

In this paper, the surface morphology of InAlAs layers deviating from the lattice-matched composition with an InP substrate is studied. The possibility of forming an array of nanopits uniform in size and shape on the surface of the InAlAs layer is demonstrated. A linear relationship between the size of pits on the surface of a InAlAs layer and its thickness is shown.