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Abstract <p>Nanostructured nitride TiAlSiN and carbonitride TiAlSiCN coatings were formed by reactive magnetron sputtering on various types of substrates. Elemental composition was studied by energy dispersive X-ray spectroscopy (EDX) as well as structure by X-ray diffraction and micromechanical properties by nanoindentation. It was found that the formed coatings have a single-phase structure, which is a disordered solid solution with a face-centered cubic lattice. It was detected that a decrease in the degree of reactivity α from α = 0.605 to α = 0.421 leads to an increase in the deposition rate of nitride TiAlSiN and carbonitride TiAlSiСN coatings on silicon substrates by 200–300%. The hardness of the formed coatings varies in the range <i>H</i> = 28.74–48.99&#xa0;GPa and Young’s modulus is <i>E</i> = 324.97–506.12&#xa0;GPa. TiAlSiN and TiAlSiCN coatings demonstrate high indices of impact strength <i>H</i>/<i>E</i> * = 0.07–0.12 and resistance to plastic deformation <i>H</i><sup>3</sup>/<i>E</i> *<sup>2</sup> = 0.13–0.72. The micromechanical properties of the formed nanostructured nitride and carbonitride coatings TiAlSiN and TiAlSiCN are promising for use in space technologies.</p>

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Effect of Deposition Modes on Micromechanical Properties of Nanostructured TiAlSiN and TiAlSiCN Coatings

  • 期刊论文

  • 发表日期：

    2025年8月1日

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  • S. V. Konstantinov,
  • F. F. Komarov,
  • I. V. Chizhov,
  • V. A. Zaikov

摘要

Abstract

Nanostructured nitride TiAlSiN and carbonitride TiAlSiCN coatings were formed by reactive magnetron sputtering on various types of substrates. Elemental composition was studied by energy dispersive X-ray spectroscopy (EDX) as well as structure by X-ray diffraction and micromechanical properties by nanoindentation. It was found that the formed coatings have a single-phase structure, which is a disordered solid solution with a face-centered cubic lattice. It was detected that a decrease in the degree of reactivity α from α = 0.605 to α = 0.421 leads to an increase in the deposition rate of nitride TiAlSiN and carbonitride TiAlSiСN coatings on silicon substrates by 200–300%. The hardness of the formed coatings varies in the range H = 28.74–48.99 GPa and Young’s modulus is E = 324.97–506.12 GPa. TiAlSiN and TiAlSiCN coatings demonstrate high indices of impact strength H/E * = 0.07–0.12 and resistance to plastic deformation H3/E *2 = 0.13–0.72. The micromechanical properties of the formed nanostructured nitride and carbonitride coatings TiAlSiN and TiAlSiCN are promising for use in space technologies.