Protective Heterophase Coatings Produced by Electrospark Deposition and High-Power Impulse Magnetron Sputtering

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发表日期：

2024年8月1日

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E. I. Zamulaeva,
A. E. Kudryashov,
Ph. V. Kiryukhantsev-Korneev,
E. A. Bashkirov,
S. K. Mukanov,
Yu. S. Pogozhev,
E. A. Levashov

摘要

Abstract

In order to increase the service life of critical products made of refractory metals, the most effective is the use of protective coatings based on oxidation-resistant ceramic materials. Using an electrode/target made of heterophase HfSi₂–MoSi₂–HfB₂ ceramics by electrospark deposition (ESD), high-power impulse magnetron sputtering (HIPIMS) technologies, as well as the combined ESD + HIPIMS technology, coatings were deposited onto molybdenum substrate (MCh-1 brand). Electrode materials and coatings were studied by the X-ray diffraction, the glow discharge optical emission spectroscopy, the X-ray spectral microanalysis, and the scanning electron microscopy. Combined ESD + HIPIMS technology made it possible to create a hard layer of oxidation-resistant ceramics on the surface of the substrate, which does not produce through cracks inherent in ESD coatings.