Reflectometry in the Soft X-Ray Range with a Laser-Plasma Radiation Source

The design and application of reflectometers with a grazing incidence grating for the wavelength region shorter than 300 Å are discussed. The focus is on reflectometers with laser-produced plasma sources excited by a pulsed-periodic laser with “moderate” output parameters (pulse energy of 0.1 to 1 J, pulse duration of 10 ns or less). Our findings can be useful for the development of metrological facilities in the soft X-ray range of the spectrum, both laboratory-based and included in commercial production of integrated circuits by projection X-ray lithography.