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A New Method for Producing Amorphous Silicon Films with a Fano Resonance

  • N. N. Melnik,
  • V. V. Tregulov,
  • V. S. Khilov,
  • N. V. Rybina,
  • N. B. Rybin,
  • D. S. Kostsov

摘要

Abstract

We report on a new method for producing amorphous silicon in which a Fano resonance is observed. The method involves treating a porous silicon film doped with boron with pulsed laser radiation. The results of studying the fabricated amorphous silicon films using Raman spectroscopy are presented.