Study of Near-Threshold Power Discharge in Miniature Low-Pressure Microwave Induction Plasmatron

The results of research using 2D simulation in the drift-diffusion approximation of a plasma discharge in a cylindrical dielectric cuvette of 14 mm diameter for a low-pressure induction plasmatron with pumping at a frequency of 2.45 GHz with near-threshold power of 10–25 mW are presented. Spatial distributions of discharge plasma parameters and absorption of electromagnetic energy are calculated. The magnetic field penetrates the plasma to the axis of the cuvette and has a solenoidal behavior with no strong skin effect. The results can be used to develop plasma generators for miniature radio-electronic and gas analytical devices.