Model of Surface Nanorelief Formation under Irradiation with Gas Cluster Ions

A model for the evolution of surface nanorelief under irradiation with gas cluster ions is proposed. The model is based on the consideration of individual cluster collisions with a surface. The amount of material sputtered from the collision area and the efficiency of its redeposition on other surface elements are determined. The model’s performance is demonstrated through comparison with experimental data. The stages of smoothing the model harmonic relief are investigated. A new measure of surface smoothing efficiency is proposed.