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<p>This study presents a sustainable approach to gas sensor fabrication by utilizing zinc oxide (ZnO) thin films (purity: 91.87%) derived from industrial waste. ZnO films were deposited on silicon substrates via thermal vacuum evaporation and subsequently chemically etched for varying durations to enhance gas-sensing properties. Structural analyses revealed polycrystalline films with crystallite sizes decreasing from 18.2 to 16.12 nm and increasing porosity from 63 to 70% as etching time increased (5–15min). Gas-sensing performance was evaluated at room temperature (28&#xa0;°C) using a custom setup with hydrogen, ammonia, and carbon dioxide. The sample with a 10-min etching time exhibited the highest sensitivity to hydrogen, at approximately 42%, compared to the as-deposited sample and those with etching times of 10 and 15 min, revealing a rapid response and recovery times of 3.3 and 6.3 s, respectively. These results highlight the potential of waste-derived ZnO films for efficient hydrogen sensing in environmental monitoring.</p> Graphical abstract <p></p>

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Room-temperature hydrogen gas sensor based on porous zinc oxide extracted from industrial waste

  • 期刊论文

  • 发表日期：

    2025年12月24日

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  • Shahbaa F. Bdewi,
  • Mazin A. Alalousi,
  • Jamal M. Rzaij,
  • Sundus Alzuhairi,
  • Oun Al-iedani

摘要

This study presents a sustainable approach to gas sensor fabrication by utilizing zinc oxide (ZnO) thin films (purity: 91.87%) derived from industrial waste. ZnO films were deposited on silicon substrates via thermal vacuum evaporation and subsequently chemically etched for varying durations to enhance gas-sensing properties. Structural analyses revealed polycrystalline films with crystallite sizes decreasing from 18.2 to 16.12 nm and increasing porosity from 63 to 70% as etching time increased (5–15min). Gas-sensing performance was evaluated at room temperature (28 °C) using a custom setup with hydrogen, ammonia, and carbon dioxide. The sample with a 10-min etching time exhibited the highest sensitivity to hydrogen, at approximately 42%, compared to the as-deposited sample and those with etching times of 10 and 15 min, revealing a rapid response and recovery times of 3.3 and 6.3 s, respectively. These results highlight the potential of waste-derived ZnO films for efficient hydrogen sensing in environmental monitoring.

Graphical abstract