Simulation of an experimental device for the confinement of argon plasma to determine the optimal operating conditions using Comsol Multiphysics
摘要
This work developed a simulation to determine the optimal conditions for argon gas pressure, input flow, and magnetic field required for plasma confinement, aiming to compare with an experimental device. The process included designing and meshing the geometry, selecting domains, and assigning physics using finite elements, followed by interpreting the results. The study found minimal differences in plasma densities between the flows of 0.025, 100, and 200 sccm, with a slight variation of 0.21 × 101⁸ cm⁻3 between 200 and 0.025 sccm. Due to this small variation, a flow of 0.025 sccm was used in subsequent experiments to reduce argon consumption. At a density of 1.57 × 101⁸ cm⁻3, an electron temperature of 3.28 eV was reached. A comparison between experimental and simulated results showed a difference margin of 19.10%, with a simulation confidence level of 79.63%.
Graphical abstract