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<p>Alloys used for high-temperature and more corrosion-resistant semiconductor pedestal heater applications suffer from lower thermal conductivity, resulting in poorer thermal uniformity. To passively improve thermal uniformity without implementing complex engineering solutions, thermal pyrolytic graphite (TPG®) was encapsulated in stainless steel and made into a pedestal heater. TPG® has exceptionally high in-plane thermal conductivity, ideal for heat spreading applications. The use of TPG® in a prototype 8″ stainless steel pedestal heater resulted in a 2 × improvement in thermal uniformity. In addition, thermomechanical modeling showed a similar estimated improvement for 12″ heaters with both single -and double-coil configurations. This passive improvement in thermal uniformity is an additional path forward to better pedestal heater thermal uniformity which can be used instead of, or in addition to, complex engineering solutions, such as additional heating zones.</p> Graphical abstract <p></p>

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Improved thermal uniformity in pedestal heaters through the integration of thermal pyrolytic graphite (TPG®)

  • 期刊论文

  • 发表日期：

    2025年3月7日

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  • Matt Gallaugher,
  • Ismail Nas,
  • Anand Murugaiah,
  • Jefferson Troha,
  • David Sabens,
  • Tomoe Yamamoto,
  • Iqbal Nasir,
  • Wei Fan

摘要

Alloys used for high-temperature and more corrosion-resistant semiconductor pedestal heater applications suffer from lower thermal conductivity, resulting in poorer thermal uniformity. To passively improve thermal uniformity without implementing complex engineering solutions, thermal pyrolytic graphite (TPG®) was encapsulated in stainless steel and made into a pedestal heater. TPG® has exceptionally high in-plane thermal conductivity, ideal for heat spreading applications. The use of TPG® in a prototype 8″ stainless steel pedestal heater resulted in a 2 × improvement in thermal uniformity. In addition, thermomechanical modeling showed a similar estimated improvement for 12″ heaters with both single -and double-coil configurations. This passive improvement in thermal uniformity is an additional path forward to better pedestal heater thermal uniformity which can be used instead of, or in addition to, complex engineering solutions, such as additional heating zones.

Graphical abstract