<p>The optimal design of a beam transport system is crucial for ion implanters, as it directly affects productivity, beam angle accuracy, and implantation uniformity. Achieving this optimization requires determining the initial state of the ion beam. This study investigates the emittance values and phase-space distributions of ion beams generated by an indirectly heated cathode ion source for high-energy implantation using BF₃, AsH₃, and PH₃ plasmas. We adjusted various parameters in the ion implantation process, such as arc current, extraction gap length, and the magnetic field at the ion source, to accommodate a wide range of implantation conditions. In addition, we measured the emittance at different points, either at the front or back of the analyzing magnet, which separated the ion beam into individual species. These measurements provided comprehensive data on the initial conditions of ion implantation and offered insights into the effects of each parameter on phase-space distribution.</p> Graphical abstract <p></p>