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<p>This study validated beam transport simulations using a test bench to enhance the productivity of high-energy ion implanters. The results confirmed the validity of the beam transport simulations in the low-current region. It is anticipated that a beam transport similar to that predicted by simulations can be achieved in an actual high-energy ion implanter. Consequently, the time required to establish an implantation process can be significantly reduced using simulations.</p> Graphical abstract <p></p>

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Validation of three-dimensional simulation of beam transport using linear accelerator based on measured phase-space distributions

  • 期刊论文

  • 发表日期：

    2025年1月16日

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  • Yuma Hirai,
  • Yugo Saito,
  • Haruka Sasaki

摘要

This study validated beam transport simulations using a test bench to enhance the productivity of high-energy ion implanters. The results confirmed the validity of the beam transport simulations in the low-current region. It is anticipated that a beam transport similar to that predicted by simulations can be achieved in an actual high-energy ion implanter. Consequently, the time required to establish an implantation process can be significantly reduced using simulations.

Graphical abstract