Scholarlink

<p>A gas sensor was fabricated using a sensitive MoO<sub>3</sub> film with the Si–SiO<sub>2</sub>/Cr–Au/MoO<sub>3</sub> structure and CO (carbon monoxide) as the analyte gas. An interdigitated design for the electrodes was defined through photolithography, and the lift-off photolithography technique was employed to define the active area. Subsequently, a MoO<sub>3</sub> film (120&#xa0;nm) was deposited by sputtering in a reactive O<sub>2</sub> atmosphere. Characterizations of the MoO<sub>3</sub> films were conducted using XPS to confirm the formation of MoO<sub>3</sub>. UV–Vis spectroscopy and the Tauc method were utilized to calculate the band gap of 3.72&#xa0;eV and 3.77&#xa0;eV. SEM images of the MoO<sub>3</sub> film surface revealed a uniform surface, and the four-point probe test showed a resistivity of 8.93 × 10<sup>3</sup> Ωcm. Finally, a static CO sensing test resulted in a sensitivity of 25% and 59% for 500&#xa0;ppm of CO for unannealed and annealed devices, respectively.</p> Graphical abstract <p></p>

错误：搜索内容不能为空，请输入英文关键词
错误：关键词超出字数限制，请精简
高级检索

Manufacture and study of a chemiresistive gas sensor using MoO3 as a sensitive film

  • 期刊论文

  • 发表日期：

    2024年12月31日

查看全文
  • Leonardo Sebastian Sanchez-Fernandez,
  • Ariel Guzmán Vargas,
  • María de La Luz Olvera Amador,
  • Francisco Javier Hernández Cuevas,
  • Isai Salvador Hernandez Luna,
  • Norberto Hernandez-Como

摘要

A gas sensor was fabricated using a sensitive MoO3 film with the Si–SiO2/Cr–Au/MoO3 structure and CO (carbon monoxide) as the analyte gas. An interdigitated design for the electrodes was defined through photolithography, and the lift-off photolithography technique was employed to define the active area. Subsequently, a MoO3 film (120 nm) was deposited by sputtering in a reactive O2 atmosphere. Characterizations of the MoO3 films were conducted using XPS to confirm the formation of MoO3. UV–Vis spectroscopy and the Tauc method were utilized to calculate the band gap of 3.72 eV and 3.77 eV. SEM images of the MoO3 film surface revealed a uniform surface, and the four-point probe test showed a resistivity of 8.93 × 103 Ωcm. Finally, a static CO sensing test resulted in a sensitivity of 25% and 59% for 500 ppm of CO for unannealed and annealed devices, respectively.

Graphical abstract